VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
NBS SRM 1521 B-70: Boron Doped Si (floodgun test)
1
 
NORM
REGULAR
3
0
0
0
0
0
3
 
NBS SRM 1521 B-70: Boron Doped Si (floodgun test)
2003
5
10
13
44
6
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
30.01
1
0
2
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
294
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
6
4.00E-06
0
0
0
0
512
0
274
1.09339
1.09429
28
1.09339
48
1.09339
31
1.09339
25
1.0934
35
1.0934
16
1.0934
39
1.09341
20
1.09341
35
1.09341
25
1.09342
31
1.09342
29
1.09342
24
1.09343
27
1.09343
19
1.09344
27
1.09344
20
1.09344
34
1.09345
30
1.09345
52
1.09345
21
1.09346
7
1.09346
31
1.09346
23
1.09347
30
1.09347
26
1.09348
25
1.09348
19
1.09348
20
1.09349
31
1.09349
40
1.09349
19
1.0935
33
1.0935
35
1.0935
27
1.09351
32
1.09351
18
1.09351
16
1.09352
31
1.09352
35
1.09353
35
1.09353
7
1.09353
23
1.09354
12
1.09354
38
1.09354
13
1.09355
22
1.09355
26
1.09355
17
1.09356
40
1.09356
12
1.09356
23
1.09357
35
1.09357
18
1.09358
26
1.09358
20
1.09358
36
1.09359
29
1.09359
24
1.09359
54
1.0936
7
1.0936
36
1.0936
32
1.09361
23
1.09361
36
1.09361
51
1.09362
29
1.09362
17
1.09363
15
1.09363
25
1.09363
33
1.09364
19
1.09364
12
1.09364
35
1.09365
39
1.09365
27
1.09365
44
1.09366
27
1.09366
40
1.09367
15
1.09367
39
1.09367
40
1.09368
31
1.09368
55
1.09368
49
1.09369
45
1.09369
32
1.09369
47
1.0937
30
1.0937
27
1.0937
55
1.09371
24
1.09371
54
1.09372
37
1.09372
24
1.09372
31
1.09373
43
1.09373
32
1.09373
33
1.09374
41
1.09374
37
1.09374
51
1.09375
27
1.09375
44
1.09375
48
1.09376
42
1.09376
49
1.09377
39
1.09377
43
1.09377
46
1.09378
52
1.09378
62
1.09378
58
1.09379
55
1.09379
55
1.09379
78
1.0938
74
1.0938
74
1.0938
57
1.09381
94
1.09381
71
1.09382
73
1.09382
71
1.09382
96
1.09383
98
1.09383
83
1.09383
81
1.09384
128
1.09384
128
1.09384
157
1.09385
152
1.09385
183
1.09385
173
1.09386
206
1.09386
218
1.09387
207
1.09387
215
1.09387
232
1.09388
272
1.09388
258
1.09388
274
1.09389
251
1.09389
259
1.09389
264
1.0939
253
1.0939
246
1.0939
214
1.09391
215
1.09391
242
1.09391
165
1.09392
197
1.09392
194
1.09393
124
1.09393
138
1.09393
134
1.09394
125
1.09394
116
1.09394
84
1.09395
92
1.09395
91
1.09395
88
1.09396
71
1.09396
54
1.09396
42
1.09397
48
1.09397
43
1.09398
30
1.09398
26
1.09398
32
1.09399
21
1.09399
26
1.09399
26
1.094
13
1.094
39
1.094
22
1.09401
39
1.09401
16
1.09401
20
1.09402
16
1.09402
24
1.09403
17
1.09403
17
1.09403
23
1.09404
8
1.09404
23
1.09404
47
1.09405
28
1.09405
29
1.09405
28
1.09406
37
1.09406
13
1.09406
12
1.09407
35
1.09407
27
1.09408
25
1.09408
30
1.09408
23
1.09409
24
1.09409
40
1.09409
16
1.0941
11
1.0941
11
1.0941
19
1.09411
23
1.09411
28
1.09411
30
1.09412
21
1.09412
20
1.09412
35
1.09413
20
1.09413
20
1.09414
23
1.09414
31
1.09414
9
1.09415
24
1.09415
22
1.09415
25
1.09416
15
1.09416
17
1.09416
28
1.09417
15
1.09417
14
1.09417
22
1.09418
35
1.09418
29
1.09419
22
1.09419
24
1.09419
37
1.0942
10
1.0942
19
1.0942
15
1.09421
19
1.09421
15
1.09421
19
1.09422
21
1.09422
27
1.09422
25
1.09423
26
1.09423
28
1.09423
35
1.09424
11
1.09424
7
1.09425
31
1.09425
11
1.09425
35
1.09426
0
1.09426
30
1.09426
22
1.09427
23
1.09427
24
1.09427
33
1.09428
17
1.09428
14
1.09428
24
1.09429
18
1.09429
14
1.09429
 
NBS SRM 1521 B-70: Boron Doped Si (floodgun test)
2003
5
10
13
44
6
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
30.01
1
0
2
1000
2000
55
0
data_2
data_2
-1
Binding energy
eV
112
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
20
4.00E-06
0
0
0
0
512
0
476
1.10118
1.10197
58
1.10118
81
1.10118
91
1.10118
59
1.10119
57
1.10119
78
1.10119
57
1.1012
70
1.1012
75
1.1012
55
1.10121
48
1.10121
83
1.10121
58
1.10122
60
1.10122
59
1.10122
49
1.10122
69
1.10123
55
1.10123
57
1.10123
67
1.10124
36
1.10124
51
1.10124
58
1.10125
62
1.10125
66
1.10125
45
1.10126
56
1.10126
38
1.10126
52
1.10127
38
1.10127
47
1.10127
44
1.10127
56
1.10128
43
1.10128
30
1.10128
56
1.10129
37
1.10129
48
1.10129
38
1.1013
46
1.1013
48
1.1013
34
1.10131
46
1.10131
33
1.10131
27
1.10132
59
1.10132
39
1.10132
43
1.10132
35
1.10133
37
1.10133
31
1.10133
35
1.10134
47
1.10134
50
1.10134
48
1.10135
38
1.10135
46
1.10135
39
1.10136
16
1.10136
39
1.10136
43
1.10137
33
1.10137
37
1.10137
46
1.10138
43
1.10138
29
1.10138
37
1.10138
27
1.10139
27
1.10139
35
1.10139
26
1.1014
34
1.1014
36
1.1014
33
1.10141
41
1.10141
25
1.10141
34
1.10142
30
1.10142
31
1.10142
35
1.10143
44
1.10143
37
1.10143
35
1.10143
39
1.10144
35
1.10144
47
1.10144
30
1.10145
23
1.10145
39
1.10145
21
1.10146
20
1.10146
34
1.10146
27
1.10147
23
1.10147
39
1.10147
12
1.10148
30
1.10148
41
1.10148
41
1.10148
15
1.10149
40
1.10149
37
1.10149
31
1.1015
28
1.1015
29
1.1015
34
1.10151
23
1.10151
31
1.10151
33
1.10152
31
1.10152
43
1.10152
41
1.10153
35
1.10153
31
1.10153
46
1.10153
45
1.10154
50
1.10154
53
1.10154
68
1.10155
62
1.10155
61
1.10155
90
1.10156
86
1.10156
114
1.10156
120
1.10157
144
1.10157
145
1.10157
131
1.10158
170
1.10158
225
1.10158
189
1.10158
245
1.10159
240
1.10159
269
1.10159
276
1.1016
302
1.1016
292
1.1016
317
1.10161
333
1.10161
351
1.10161
332
1.10162
333
1.10162
341
1.10162
378
1.10162
302
1.10163
328
1.10163
282
1.10163
278
1.10164
286
1.10164
243
1.10164
274
1.10165
221
1.10165
226
1.10165
205
1.10166
192
1.10166
160
1.10166
173
1.10167
145
1.10167
154
1.10167
165
1.10167
130
1.10168
156
1.10168
118
1.10168
169
1.10169
173
1.10169
207
1.10169
201
1.1017
237
1.1017
321
1.1017
298
1.10171
362
1.10171
360
1.10171
431
1.10172
444
1.10172
409
1.10172
433
1.10172
440
1.10173
470
1.10173
476
1.10173
412
1.10174
367
1.10174
274
1.10174
196
1.10175
180
1.10175
112
1.10175
81
1.10176
77
1.10176
34
1.10176
32
1.10177
36
1.10177
28
1.10177
34
1.10177
19
1.10178
15
1.10178
24
1.10178
12
1.10179
26
1.10179
23
1.10179
17
1.1018
15
1.1018
19
1.1018
20
1.10181
20
1.10181
9
1.10181
18
1.10181
28
1.10182
18
1.10182
15
1.10182
13
1.10183
8
1.10183
15
1.10183
20
1.10184
11
1.10184
21
1.10184
19
1.10185
7
1.10185
6
1.10185
15
1.10186
12
1.10186
17
1.10186
14
1.10186
0
1.10187
5
1.10187
11
1.10187
4
1.10188
12
1.10188
17
1.10188
4
1.10189
12
1.10189
12
1.10189
8
1.1019
15
1.1019
0
1.1019
14
1.1019
18
1.10191
7
1.10191
12
1.10191
24
1.10192
21
1.10192
11
1.10192
7
1.10193
16
1.10193
11
1.10193
21
1.10194
8
1.10194
15
1.10194
1
1.10195
16
1.10195
6
1.10195
16
1.10195
17
1.10196
15
1.10196
8
1.10196
16
1.10197
2
1.10197
12
1.10197
 
NBS SRM 1521 B-70: Boron Doped Si (floodgun test)
2003
5
10
13
44
9
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
30.01
1
0
2
1000
2000
55
0
data_3
data_3
-1
Binding energy
eV
542
-0.0784314
2
counts
d
Transmission
d
pulse counting
0.2
6
4.00E-06
0
0
0
0
512
0
1002
1.08071
1.08185
69
1.08071
65
1.08072
62
1.08072
70
1.08073
63
1.08073
49
1.08074
86
1.08074
56
1.08075
58
1.08075
52
1.08075
69
1.08076
68
1.08076
70
1.08077
71
1.08077
61
1.08078
64
1.08078
51
1.08079
61
1.08079
57
1.0808
48
1.0808
59
1.0808
45
1.08081
65
1.08081
60
1.08082
58
1.08082
67
1.08083
37
1.08083
52
1.08084
48
1.08084
49
1.08084
44
1.08085
58
1.08085
26
1.08086
34
1.08086
35
1.08087
41
1.08087
53
1.08088
47
1.08088
37
1.08088
58
1.08089
34
1.08089
53
1.0809
54
1.0809
37
1.08091
30
1.08091
50
1.08092
55
1.08092
30
1.08092
26
1.08093
34
1.08093
24
1.08094
44
1.08094
41
1.08095
28
1.08095
36
1.08096
31
1.08096
32
1.08096
35
1.08097
39
1.08097
31
1.08098
19
1.08098
37
1.08099
44
1.08099
35
1.081
26
1.081
24
1.08101
27
1.08101
30
1.08101
37
1.08102
34
1.08102
42
1.08103
28
1.08103
28
1.08104
23
1.08104
35
1.08105
32
1.08105
29
1.08105
32
1.08106
32
1.08106
51
1.08107
51
1.08107
32
1.08108
22
1.08108
52
1.08109
36
1.08109
29
1.08109
25
1.0811
40
1.0811
36
1.08111
39
1.08111
15
1.08112
25
1.08112
38
1.08113
33
1.08113
38
1.08113
40
1.08114
38
1.08114
45
1.08115
32
1.08115
28
1.08116
52
1.08116
43
1.08117
39
1.08117
30
1.08117
38
1.08118
61
1.08118
41
1.08119
38
1.08119
30
1.0812
49
1.0812
51
1.08121
67
1.08121
42
1.08121
44
1.08122
46
1.08122
36
1.08123
55
1.08123
43
1.08124
85
1.08124
73
1.08125
74
1.08125
91
1.08125
91
1.08126
79
1.08126
106
1.08127
139
1.08127
152
1.08128
145
1.08128
210
1.08129
209
1.08129
218
1.08129
286
1.0813
340
1.0813
380
1.08131
441
1.08131
451
1.08132
519
1.08132
619
1.08133
650
1.08133
676
1.08133
781
1.08134
820
1.08134
757
1.08135
909
1.08135
877
1.08136
942
1.08136
958
1.08137
985
1.08137
987
1.08137
1002
1.08138
942
1.08138
859
1.08139
872
1.08139
855
1.0814
788
1.0814
738
1.08141
718
1.08141
647
1.08141
613
1.08142
536
1.08142
546
1.08143
441
1.08143
457
1.08144
439
1.08144
367
1.08145
326
1.08145
312
1.08145
327
1.08146
261
1.08146
210
1.08147
244
1.08147
180
1.08148
207
1.08148
175
1.08149
146
1.08149
135
1.08149
121
1.0815
106
1.0815
93
1.08151
92
1.08151
78
1.08152
62
1.08152
60
1.08153
55
1.08153
58
1.08153
41
1.08154
31
1.08154
21
1.08155
27
1.08155
28
1.08156
26
1.08156
20
1.08156
27
1.08157
24
1.08157
32
1.08158
25
1.08158
45
1.08159
19
1.08159
0
1.0816
21
1.0816
31
1.0816
22
1.08161
26
1.08161
23
1.08162
14
1.08162
26
1.08163
40
1.08163
30
1.08164
25
1.08164
26
1.08164
10
1.08165
42
1.08165
21
1.08166
32
1.08166
14
1.08167
15
1.08167
24
1.08168
22
1.08168
20
1.08168
24
1.08169
17
1.08169
12
1.0817
20
1.0817
12
1.08171
0
1.08171
22
1.08171
25
1.08172
27
1.08172
24
1.08173
26
1.08173
13
1.08174
26
1.08174
24
1.08175
15
1.08175
34
1.08175
20
1.08176
3
1.08176
17
1.08177
24
1.08177
25
1.08178
16
1.08178
20
1.08179
26
1.08179
21
1.08179
29
1.0818
23
1.0818
7
1.08181
40
1.08181
15
1.08182
0
1.08182
14
1.08183
22
1.08183
28
1.08183
28
1.08184
20
1.08184
8
1.08185
end of experiment
